High Resolution Physical Analyses of Microvia - Target Pad Interfaces
Open circuit failure in microvias is an important issue for critical device reliability yet remains poorly understood. Separations at the microvia-target pad interface caused by board-normal tensile stress from heating during solder reflow in manufacturing can produce opens that show immediately or present as pernicious opens that manifest at module, sub-system, or system level testing and operation.
The present project involves a series of samples from failed boards, non-failed boards and experimental D-coupons, applying advanced high electron microscope resolution imaging and elemental analysis tools to the microvia-target pad interface regions in cross-sectioned microvias. One of these tools, electron backscatter diffraction (EBSD), has revealed that the interfaces of failed microvias are microstructural discontinuities, with the grain structures of both sides terminating at a relatively flat plane that is oriented in a poor orientation with respect to the primary tensile stress direction and comprises a significant structural weakness with respect to crack/separation formation and propagation resistance and electrical failure.
Transmission electron microscopy (TEM) further reveals nanometer-scale concentrations of apparent contaminants along the interface, probably representing residue from the electroless copper deposition or related manufacturing steps.
Microvias from a lot exhibiting especially mechanically strong interfaces show a unique microstructure in EBSD: “Fan” grains, which are fine, blade-like clusters of radiating grains oriented approximately parallel to the central axis of the microvia and extending from the interior of the target pad into the interior of the microvia. This feature effectively strengthens the interface, eliminating the path of cracking/separation propagation weakness and imparting a stronger microstructure for improved reliability.